JPH0316340U - - Google Patents
Info
- Publication number
- JPH0316340U JPH0316340U JP7718589U JP7718589U JPH0316340U JP H0316340 U JPH0316340 U JP H0316340U JP 7718589 U JP7718589 U JP 7718589U JP 7718589 U JP7718589 U JP 7718589U JP H0316340 U JPH0316340 U JP H0316340U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- fixed
- rotating arm
- cassette
- planetary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7718589U JPH0731544Y2 (ja) | 1989-06-29 | 1989-06-29 | ウエハカセツトの移載装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7718589U JPH0731544Y2 (ja) | 1989-06-29 | 1989-06-29 | ウエハカセツトの移載装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0316340U true JPH0316340U (en]) | 1991-02-19 |
| JPH0731544Y2 JPH0731544Y2 (ja) | 1995-07-19 |
Family
ID=31619335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7718589U Expired - Lifetime JPH0731544Y2 (ja) | 1989-06-29 | 1989-06-29 | ウエハカセツトの移載装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731544Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003015156A1 (fr) * | 2001-08-02 | 2003-02-20 | Takehide Hayashi | Robot de montage foup pour efem semi-conducteur |
| CN115036248A (zh) * | 2022-08-12 | 2022-09-09 | 安徽大华半导体科技有限公司 | 一种防过载芯片推出装置 |
-
1989
- 1989-06-29 JP JP7718589U patent/JPH0731544Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003015156A1 (fr) * | 2001-08-02 | 2003-02-20 | Takehide Hayashi | Robot de montage foup pour efem semi-conducteur |
| CN115036248A (zh) * | 2022-08-12 | 2022-09-09 | 安徽大华半导体科技有限公司 | 一种防过载芯片推出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0731544Y2 (ja) | 1995-07-19 |